Fouquet 表示 High-NA EUV 获得首批客户验收且反馈积极,目前讨论焦点是导入量产的时机与规模。
我们获得了前两台的客户验收,经过多年研发这是一个重大里程碑。DRAM 和逻辑客户对成像性能的反馈一直非常积极,他们很满意,现在关键讨论是何时、如何以及以多大量将该设备导入量产。原文 (en)
we got the first two customer acceptance which you know after so many years of development has been a major Milestone the feedback on the Imaging performance from our dram customer logic customer continue to be very very positive they like what they see and the key discussion Now is really when how and in which volume I would say to insert this tool into volume manufacturing