Fouquet 表示 NXE:3800 低 NA EUV 今年将具备量产支持能力,并成为低 NA 出货主力。
我们正与客户继续完善该平台,使设备今年能够真正支持大规模量产。该设备今年也将成为低数值孔径 EUV 出货的主体。原文 (en)
we are continuing to mature basically the platform with our customer so that the tool can be ready this year to really support high volume manufacturing as you know as well on this tool this will become the majority of for shipment when it comes to Lowa this year