Fouquet宣布首台用于量产的High-NA EXE 5200已交付,产能达每小时175片晶圆。
我们已交付首台EXE 5200,这是将用于大规模量产的设备。设备正在安装中,提醒一下,它相比5000将为客户带来60%的生产率提升,即每小时175片晶圆。原文 (en)
we have shipped our first EXE 5200 which is the tool that is going to be used in high volume manufacturing. The tool is under installed and as a reminder this will provide our customer with 60% productivity improvement compared to the 5,000. So we're talking about 175 wafer per hour.