Fouquet 称高 NA EUV 已在客户处运行超 30 万片晶圆,成熟速度快于当年的低 NA。
在高 NA 方面,我们分享了客户处已运行超过 30 万片晶圆,一些客户还报告称,高 NA 目前的成熟度明显领先于低 NA 在同一阶段的成熟度。原文 (en)
on ina we shared the fact that at our customer more than 300,000 wafer were now run and some of our customer also reported the fact that the maturity of INA today is quite ahead of what the maturity of lo was at a certain period of time.