Fouquet称High-NA EUV认证进展顺利,英特尔已验收首台用于量产的EXE:5200。
看High-NA,客户在认证方面持续取得良好进展。我过去谈过三个阶段。许多客户正在用EXE:5000完成研发阶段。英特尔已报告验收了首台EXE:5200,这意味着他们拥有了首台将用于大规模量产的设备。原文 (en)
Looking at INA, uh customer continue to make good progress on the qualification. I talked about the free phases in the past. A lot of customer are finalizing their R&D phases with the 5,000. Intel has reported that they have accepted their first 5200 which means basically they have the first tool that will be used in high volume manufacturing